Some days we don't have enough time, other days we have too much. As a result, we either never get around to the things we really want to do, or we procrastinate. That's why productivity expert John ...

This paper presents a new method, design for inspection (DFI) to characterize overlay. Using design-assisted voltage contrast measurement, the method enables in-line test and monitoring of process ...

Overlay is one of the most critical process control steps of semiconductor manufacturing technology. A typical advanced scheme includes an overlay feedback loop based on after litho optical imaging ...